New power controller increases stability of semiconductor and industrial processes

Advanced Energy Industries, Inc. has announced a new silicon-controlled rectifier (SCR) power controller for precision control of lamp-based heating applications. Delivering unprecedented speed and accuracy, the new Thyro-XD supports next-generation semiconductor manufacturing and industrial processes that demand precision temperature control, particularly during extreme and dynamic ramps.

“Demand for smaller, faster, and more efficient computer chips is driving the need for innovative controls in wafer processing equipment for semiconductor production,” said Dhaval Dhayatkar, Advanced Energy’s vice president of Critical Sensing and Control Products, System Power. “The new Thyro-XD offers unmatched speed and precision for temperature control, significantly enhancing stability and repeatability, particularly for lamp-based heating applications, in the smallest form factor available.”

The device provides highly accurate, rapid load resistance measurement, facilitating faster detection of temperature changes and tighter process control. It has a high-power density of 188W/in3, is optimised for semiconductor tools, and doubles the control capacity versus other available products. Convection cooling eliminates the necessity for fans, improving simplicity and reliability.

With real-time resistance measurement, the SCR can prevent potential damage to resistors, thereby reducing the need for expensive maintenance and replacement. In addition, a five-fold increase in load voltage, load current and output power accuracy enables the fastest compensation for input fluctuations while increasing efficiency.

The Thyro-XD offers optional EtherCat connectivity via the Advanced Bus Module (ABM) and interface cards, allowing for the integration of temperature feedback from multiple Advanced Energy Impac measurement pyrometers for real-time temperature control.