MEMS capacitive accelerometers offer low-noise measurements

16-09-2021 | Silicon Designs | Semiconductors

Silicon Designs has released its single-axis Model 2210 series. These low-noise, low-cost MEMS capacitive accelerometer modules provide accurate and repeatable measurements over various lower-frequency vibration testing applications, including those common to vibration analysis, modal analysis, robotics, machinery control, and crash event detection. Provided in standard ranges from ±2g to ±400g, the rugged design of the series includes a MEMS capacitive accelerometer chip with high-drive, low-impedance buffering. When utilised together with a recommended mounting block accessory, such as its own Model 2330-BLK, the series can dependably and flexibly measure vibration and acceleration on one, two, or three orthogonal axes with equal accuracy and repeatability. The measurement versatility provided by the series enables customers to specify one part number for multiple, unique measurement demands, thereby lessening in-house costs and inventory counts.


All of the series MEMS capacitive accelerometer modules produce two analog voltage outputs which vary in response to applied acceleration. Customers can use either a single-ended or differential output. The latter doubles accelerometer sensitivity. The sensitive axis of the series is perpendicular to the package bottom, with positive acceleration characterised as a force pushing on the bottom of that package. Output scale factor is independent from the supply voltage of +8V to +32V. At zero acceleration, differential output voltage is nominally 0VDC; at full scale, it is ±4VDC. A simple-yet-robust four-wire connection and internal voltage regulator reduce supply voltage variation effects. The high-quality MEMS capacitive sense element of each module is packaged within a single, compact, lightweight, epoxy sealed and anodised aluminium housing occupying a total dimensional footprint of one square inch.


All modules are relatively insensitive to temperature changes and provide quick, easy self-calibration. Each product is 100% designed, developed, and manufactured at the company’s own global corporate headquarters and ISO9001:2015 certified R&D centre. Each accelerometer also undergoes rigorous quality testing before shipment.

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