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Thermo Electron - Measurement and metrology for semiconductor and related Industries
Published Mar 1 2006
The publication of a new brochure demonstrating its complete range of
high-performance solutions for the semiconductor, microelectronics and disk
storage industry, has been announced by Thermo Electron.
The 8-page brochure provides process and defect engineers, as well as
production managers, with a quick reference to the company's offerings in
the fields of plasma mass spectroscopy, FT-IR metrology, Raman
microspectroscopy and numerous X-ray spectroscopies including angle-resolved
XPS, microbeam XRF and EDS for electron microscopy and defect review.
The brochure demonstrates the company's expertise in these manufacturing
environments with specifically engineered instrumentation in both the
support lab, and on the fab floor with near-line and at-line measurement and
metrology tools that meet the rigorous demands of production monitoring. The
brochure provides a review of the capabilities, characteristics, benefits
and applications of this instrument family, and provides background
regarding each instrument's underlying technique.
As yield management tools to monitor production parameters and locate
defects become even more critical to the financial success of the
fabrication units, and as wafer sizes grow to 300mm and feature sizes shrink
to 45 nanometers, fast and reliable methods that accurately measure the
chemistry and physical dimensions of silicon wafers and packaging are
imperative. Thermo offers several proven techniques for the production of
semiconductor wafers, microchips, solid state circuitry and
microelectronics.
Many of the semiconductor production monitoring tools include wafer handling
automation built to industry-standard guidelines and feature built-in
automated analytical methods tied to production control and an information
system, says the company.
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